| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for an inkjet recording head which can form a highly accurate channel shape, and to provide the inkjet recording head obtained by the manufacturing method. <P>SOLUTION: The inkjet recording head including a substrate which has an energy generating element, a discharge port for discharging ink and a channel forming member for forming the channel of the ink to communicate with the discharge port is manufactured by a manufacturing method including the step of providing a pattern of the channel by a positive type photosensitive resin on a substrate, the step of providing a coating resin layer of a negative type photosensitive resin being the channel forming member so as to cover the pattern on the substrate, the step of forming the discharge port by exposing the coating resin layer by only light having a wavelength of 300 nm or longer, and the step of forming the channel by removing the pattern. However, the pattern has sensitivity with the light having a shorter wavelength than 300 nm, and has no sensitivity to the light used to expose the coating resin layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
