PROBE SYSTEM AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A probe device and a manufacturing method thereof are provided to prevent position breakaway of a contact electrode from an electrode of an object under test. CONSTITUTION: A wiring sheet(44) has flexibility and comprises a plurality of wires and a plurality of contact electrodes. The plurality of wires is placed at one surface of the wiring sheet. The plurality of wires is extended to a second direction which crosses in a first direction. The plurality of contact electrodes is placed on the plurality of wires. A supporter supports the wiring sheet. A space maintaining member(48) has a heat expansion coefficient lower than the wiring sheet. The space maintaining member has strength higher than the wiring sheet. The space maintaining member is installed on the wiring sheet and maintains a gap of plurality of wires in the state that the wiring sheet swells.