ADSORPTION APPARATUS FOR SUBSTRATE AND SUBSTRATE INSPECTION APPARATUS USING THE SAME

摘要

PURPOSE: A substrate adsorption device and a substrate inspection device using the same are provided to prevent the damage of a substrate by steadily supporting the substrate from vibrations. CONSTITUTION: A supporting tube(110) comprises an exhaust hole in inside. An adsorption pad(130) comprises a through hole communicated in the exhaust hole. A vacuum chamber(150) is installed between the supporting tube and the adsorption pad. The vacuum chamber is communicated in the exhaust hole and the through hole. The vacuum chamber makes maintain the vacuum condition between the supporting tube and the adsorption pad for maintaining adhesive force of the substrate. A secession prevention pipe is projected from the adsorption pad toward the vacuum chamber. A part of the secession prevention pipe is located inside the vacuum chamber.