METHOD FOR MANUFACTURING TRANSPARENCY ELECTRODE USING MULTI-COMPONENT METAL OXIDE

摘要

PURPOSE: A method for manufacturing a multi-component metal oxide-based transparent electrode is provided to obtain an IGZO(Indium Gallium Zinc Oxide) transparent electrode with a low surface resistance and high transmissivity, which is able to replace an expensive ITO(Indium Tin Oxide) transparent electrode. CONSTITUTION: A method for manufacturing a multi-component metal oxide-based transparent electrode comprises the steps of: preparing a substrate and forming an IGZO film(20) on the substrate through a sputtering process at a substrate temperature of room temperature to 400°C, a working pressure of 0.5 to 8mTorr, an RF power of 10 to 80W, and a deposition time of 30 to 140 minutes. The substrate preparation step comprises the steps of: coating a glass base material(10') with a blocking solution including metal oxide, plasticizing the blocking solution at 120 to 160°C for 5 to 30 minutes first, and plasticizing the blocking solution at 420 to 520°C for 30 to 150 minutes secondly.