发明名称 Terahertz-infrared ellipsometer system, and method of use
摘要 The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including at least one odd-bounce polarization state image rotating system, and optionally including a polarizer, at least one compensator and/or modulator, in addition to an analyzer.
申请公布号 US2012206724(A1) 申请公布日期 2012.08.16
申请号 US20100802734 申请日期 2010.06.14
申请人 HERZINGER CRAIG M.;SCHUBERT MATHIAS M.;HOFMANN TINO;LIPHARDT MARTIN M.;WOOLLAM JOHN A. 发明人 HERZINGER CRAIG M.;SCHUBERT MATHIAS M.;HOFMANN TINO;LIPHARDT MARTIN M.;WOOLLAM JOHN A.
分类号 G01J4/00 主分类号 G01J4/00
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