发明名称 SEMICONDUCTOR DEVICES INCLUDING CAPACITORS AND METAL CONTACTS, AND METHODS OF FABRICATING THE SAME
摘要 Methods of fabricating a semiconductor device are provided. The method includes forming a first mold layer on a in a cell region and a peripheral region, forming first storage nodes penetrating the first mold layer in the cell region and a first contact penetrating the first mold layer in the peripheral region, forming a second mold layer on the first mold layer, forming second storage nodes that penetrate the second mold layer to be connected to respective ones of the first storage nodes, removing the second mold layer in the cell and peripheral regions and the first mold layer in the cell region to leave the first mold layer in the peripheral region, and forming a second contact that penetrates a first interlayer insulation layer to be connected to the first contact. Related devices are also provided.
申请公布号 US2012205779(A1) 申请公布日期 2012.08.16
申请号 US201113337481 申请日期 2011.12.27
申请人 KIM JUN KI;HYNIX SEMICONDUCTOR INC. 发明人 KIM JUN KI
分类号 H01L29/92;H01L21/02 主分类号 H01L29/92
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