发明名称 FABRICATING METHOD OF A PIXEL UNIT
摘要 A method for fabricating a pixel unit is provided. A TFT is formed on a substrate. A protection layer and a patterned photoresist layer are sequentially formed on the substrate entirely. A patterned protection layer is formed by using the patterned photoresist layer as a mask and partially removing the protection layer, wherein the patterned protection layer has an undercut located at a sidewall thereof A pixel electrode material layer is formed to cover the substrate, the TFT and the patterned photoresist layer, wherein the electrode material layer is disconnected at the undercut and exposes the undercut. A pixel electrode electrically connected to the TFT is formed by lifting off the patterned photoresist layer and parts of the electrode material layer covering the patterned photoresist layer simultaneously through a stripper, wherein the stripper permeates from the undercut to an interface of the patterned photoresist layer and the patterned protection layer.
申请公布号 US2012208305(A1) 申请公布日期 2012.08.16
申请号 US201213454106 申请日期 2012.04.24
申请人 LIAO CHIN-YUEH;YANG CHIH-CHUN;SHIH CHIH-HUNG;TSENG SHINE-KAI;AU OPTRONICS CORPORATION 发明人 LIAO CHIN-YUEH;YANG CHIH-CHUN;SHIH CHIH-HUNG;TSENG SHINE-KAI
分类号 H01L33/36 主分类号 H01L33/36
代理机构 代理人
主权项
地址