LED MESA SIDEWALL ISOLATION BY ION IMPLANTATION

摘要

A method of LED manufacturing is disclosed. A coating (106) is applied to a mesa. This coating may have different thicknesses on the sidewalls of the mesa compared to the top of the mesa. Ion implantation (109) into the mesa will form implanted regions (110) in the sidewalls in one embodiment. These implanted regions may be used for LED isolation or passivation.