METHOD FOR MANUFACTURING QUARTZ GLASS CRUCIBLE

摘要

The method of producing a vitreous silica crucible, comprises deposition step of depositing silica powder on an inner wall surface of a cylindrical rotation mold having a bottom while rotating the mold; and a fusion step to obtain a vitreous silica crucible by heating and fusing the silica powder deposited on the inner wall surface of the mold and thereby vitrifying the silica powder. In the deposition step, a density of the deposited silica powder layer on the inner wall surface of the mold is controlled within a predetermined range by controlling the electrostatic charging voltage of the silica powder to be in a range of 1.0kV or less in absolute value, and supplying the thus controlled silica powder to the inner wall surface of the mold. Thus, a wall thickness of the vitreous silica crucible is controlled.