发明名称
摘要 <P>PROBLEM TO BE SOLVED: To provide a vibration actuator capable of relieving a stress applied to a rotor from the outside when the rotor is stopped, and to provide a control method thereof. <P>SOLUTION: A stator 2 elliptically vibrates in a YZ-plane by flecture vibration in a Y-axis direction by a first drive section 161 and longitudinal vibration in a Z-axis direction by a second drive section 162, and the rotor 6 rotates around an X-axis. In order to stop the rotor 6, the first drive section 161 stops at first the flecture vibration in the Y-axis direction. In this way, the stator 2 linearly vibrates only in the Z-axis direction, preventing the occurrence of a torque forcibly rotating the rotor 6, and the rotor 6 is in a state of freely rotatable in response to a moment from the outside. After that, when the second drive section 162 stops the longitudinal vibration in the Z-axis direction, the rotor 6 is restricted upon application of a pre-pressure by a pre-pressure section 10, and is in a state where it cannot rotate even if a moment is applied from the outside. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP4998244(B2) 申请公布日期 2012.08.15
申请号 JP20070322223 申请日期 2007.12.13
申请人 发明人
分类号 H02N2/00;H01L41/083;H01L41/09 主分类号 H02N2/00
代理机构 代理人
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