| 摘要 |
PURPOSE: A stage apparatus is provided to release the elongation of an x-axis stator at the other side when the x-axis stator is thermally expanded. CONSTITUTION: A stage apparatus(1A) comprises a X-axis movable member(6), an X-axis shaft motor(5), a Y-axis movable member(4), and a Y-axis shaft motor(3). The X-axis movable member moves on a surface plate(2) in an X-direction. The X-axis shaft motor comprises an X-axis stator(51) and an X-axis mover(52). The X-axis shaft motor drives the X-axis movable member in the X-direction. The Y-axis movable member moves on the surface plate with the X-axis stator in a Y-direction. The Y-axis shaft motor comprises a Y-axis stator and a Y-axis mover(32). The Y-axis shaft motor drives the Y-axis movable member in the Y-direction.
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