| 发明名称 |
METHOD AND APPARATUS FOR FABRICATING OR ALTERING MICROSTRUCTURES USING LOCAL CHEMICAL ALTERATIONS |
| 摘要 |
A method and apparatus for fabricating or altering a microstructure use means for heating to facilitate a local chemical reaction that forms or alters the submicrostructure.
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| 申请公布号 |
US2012201956(A1) |
申请公布日期 |
2012.08.09 |
| 申请号 |
US201213447982 |
申请日期 |
2012.04.16 |
| 申请人 |
GUHA SUPRATIK;HAMANN HENDRIK F.;MARCHMAN HERSCHEL M.;VON GUTFELD ROBERT J.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
GUHA SUPRATIK;HAMANN HENDRIK F.;MARCHMAN HERSCHEL M.;VON GUTFELD ROBERT J. |
| 分类号 |
B05D5/12;B05D3/02;H01L21/302;H01L21/311;H01L21/3213;H01L21/336;H01L21/461;H01L21/768;H01L29/786 |
主分类号 |
B05D5/12 |
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