发明名称 |
VACUUM HEATING/COOLING APPARATUS AND MANUFACTURING METHOD OF MAGNETORESISTANCE ELEMENT |
摘要 |
The present invention provides a vacuum heating/cooling apparatus capable of rapidly heating and also rapidly cooling only a substrate while a high vacuum degree is maintained after film-formation processing. The vacuum heating/cooling apparatus according to an embodiment of the present invention includes a vacuum chamber (1), a halogen lamp (2) which emits heating light, a quartz window (3) for allowing the heating light to enter the vacuum chamber (1), a substrate supporting base (9) having a cooling function, and a lift pin (13) which causes the substrate (5) to stand still at a heating position P3 and a cooling position P1 and moves the substrate (5) between the heating position P3 and the cooling position P1.
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申请公布号 |
US2012193071(A1) |
申请公布日期 |
2012.08.02 |
申请号 |
US201113307673 |
申请日期 |
2011.11.30 |
申请人 |
TSUNEKAWA KOJI;NAGAMINE YOSHINORI;FURUKAWA SHINJI;CANON ANELVA CORPORATION |
发明人 |
TSUNEKAWA KOJI;NAGAMINE YOSHINORI;FURUKAWA SHINJI |
分类号 |
H01L21/477;F25B29/00;F27D11/12 |
主分类号 |
H01L21/477 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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