| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technology advantageous for accurately determining a shear amount in a shearing interferometer. <P>SOLUTION: A calibration method for a shearing interferometer includes: a step for determining a straight line 1 that shows a relationship between multiple shear amounts and at least one coefficient in each of multiple polynomial expressions which approximates each of multiple wave surfaces obtained by using each of the shear amounts to process first interference fringe data obtained by an imaging element when causing a drive mechanism to drive a diffraction grating so that a shear amount on an imaging surface of the imaging element becomes a first target shear amount S1; a step for determining a straight line 2 in a manner similar to the straight line 1 when causing the drive mechanism to drive the diffraction grating so that the shear amount on the imaging surface becomes a second target shear amount S2; and a step for determining each of shear amounts S1T and S2T on the straight lines 1 and 2, where a difference DD between the shear amounts on the straight lines 1 and 2 becomes equal to a difference SD between the first target shear amount S1 and the second target shear amount S2, to be a real shear amount. <P>COPYRIGHT: (C)2012,JPO&INPIT |
