INSULATING FILM AND SEMICONDUCTOR DEVICE INCLUDING THE SAME

摘要

It is made possible to provide an insulating film that can reduce the leakage current. An insulating film includes: an amorphous oxide dielectric film containing a metal, hydrogen, and nitrogen. The nitrogen amount [N] and the hydrogen amount [H] in the oxide dielectric film satisfy the following relationship: {[N]—[H]}/2≦̸1.0×1021 cm−3.