FABRICATION METHOD OF INKJET PRINTED CU ELECTRODES

摘要

PURPOSE: A manufacturing method of an inkjet printed copper electrode is provided to supply a low priced printed copper electrode by reducing a printed copper oxide electrode to a copper electrode. CONSTITUTION: An electrode printed by copper ink is formed on a substrate(30). A rapid thermal annealing device thermally processes the substrate in over 300°C by operating a heater(45) in a chamber(40). The substrate is arranged in the chamber using a substrate support(41). The air in the chamber is removed by a pump(42). Ambient gas is supplied to the chamber using an ambient gas supply device(43,44).