| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method having improved measurement sensitivity and high reproducibility to measure the characteristics of a measured object, and to provide a tabular gap arrangement structure to be used for the method. <P>SOLUTION: In the measurement method, the measured object is held on the tabular gap arrangement structure, an electromagnetic wave is applied to the gap arrangement structure, the electromagnetic wave scattered to the front or scattered to the back by the gap arrangement structure is detected, and the characteristics of the measured object are measured based on a state that a dip waveform generated in a frequency characteristic of the electromagnetic wave scattered to the front or a peak waveform generated in a frequency characteristic of the electromagnetic wave scattered to the back is changed due to the presence of the measured object. In the measurement method, the electromagnetic wave is applied from a direction vertical to the main surface of the gap arrangement structure, and a ratio of the area of a beam spot of the electromagnetic wave on a plane including the main surface of the gap arrangement structure to the area of the main surface of the gap arrangement structure is 10% and more. <P>COPYRIGHT: (C)2012,JPO&INPIT |
