摘要 |
Embodiments of the present disclosure describe techniques and configurations to impart strain to integrated circuit devices such as horizontal field effect transistors. An integrated circuit device includes a semiconductor substrate, a quantum well channel coupled with the semiconductor substrate, a source structure coupled with the quantum well channel, a drain structure coupled with the quantum well channel and a strain-inducing film disposed on and in direct contact with material of the source structure and the drain structure to reduce resistance of the quantum well channel by imparting a tensile or compressive strain on the quantum well channel, wherein the quantum well channel is disposed between the strain-inducing film and the semiconductor substrate. Other embodiments may be described and/or claimed. |