发明名称 TECHNIQUES AND CONFIGURATIONS TO IMPART STRAIN TO INTEGRATED CIRCUIT DEVICES
摘要 Embodiments of the present disclosure describe techniques and configurations to impart strain to integrated circuit devices such as horizontal field effect transistors. An integrated circuit device includes a semiconductor substrate, a quantum well channel coupled with the semiconductor substrate, a source structure coupled with the quantum well channel, a drain structure coupled with the quantum well channel and a strain-inducing film disposed on and in direct contact with material of the source structure and the drain structure to reduce resistance of the quantum well channel by imparting a tensile or compressive strain on the quantum well channel, wherein the quantum well channel is disposed between the strain-inducing film and the semiconductor substrate. Other embodiments may be described and/or claimed.
申请公布号 KR20120085925(A) 申请公布日期 2012.08.01
申请号 KR20127016074 申请日期 2010.12.02
申请人 INTEL CORPORATION 发明人 RADOSAVLJEVIC MARKO;DEWEY GILBERT;MUKHERJEE NILOY;PILLARISETTY RAVI
分类号 H01L29/772;H01L21/335 主分类号 H01L29/772
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