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发明名称
MOVABLE BODY DRIVE METHOD, MOVABLE BODY APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
摘要
申请公布号
IL220021(D0)
申请公布日期
2012.07.31
申请号
IL20120220021
申请日期
2012.05.28
申请人
YUICHI SHIBAZAKI;NIKON CORPORATION;OKUTOMI, AKIRA;HIRANO, KAZUHIRO
发明人
分类号
G05B
主分类号
G05B
代理机构
代理人
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地址
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