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发明名称	APPARATUS AND METHOD FOR TREATING SUBSTRATE
摘要
申请公布号	KR101168261(B1)	申请公布日期	2012.07.30
申请号	KR20090110967	申请日期	2009.11.17
申请人		发明人
分类号	H01L21/68;H01L21/3065	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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