发明名称 SEMICONDUCTOR PACKAGING MOLD CLEANING APPARATUS
摘要 PURPOSE: A cleaning apparatus for a semiconductor packaging mold is provided to improve productivity by cleaning a semiconductor mold without separating from an ejector. CONSTITUTION: A fixing plate(10) moves horizontally and vertically in order to wash a semiconductor mold. A chamber is installed in the fixing plate and prevents a cleaning liquid from being scattered to the outside. A cleaning liquid injection part is installed in the fixing plate and sprays the cleaning liquid inside the chamber. A brush(40) revolves and vibrates while being installed inside the chamber and eliminates foreign materials from the surface of the semiconductor mold. An exhausting part(50) discharges the foreign materials and the cleaning liquid removed from the semiconductor mold to the outside.
申请公布号 KR20120084567(A) 申请公布日期 2012.07.30
申请号 KR20110006000 申请日期 2011.01.20
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, DONG YUL;JANG, DONG SEOB;LEE, YOUNG SOO;PARK, MOUNG KWAN
分类号 H01L21/56;H01L21/02;H01L21/302 主分类号 H01L21/56
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