Semiconductor film and photoelectric conversion device

摘要

Provided is a semiconductor film (2) which includes crystalline material and is formed on the surface of a substrate (1), wherein the semiconductor film (2) has a central region (2b) which includes the centre of the surface of the semiconductor film (2) and a peripheral region (2a) which is positioned around the central region (2b), and the crystallization rate in the peripheral region (2a) of the semiconductor film (2) is higher than the crystallization rate in the central region (2b), and further provided is a photoelectric conversion device which includes the semiconductor film (2).