| 摘要 |
<p>PURPOSE: An atomic layer deposition apparatus for a solar cell is provided to achieve excellent throughput by performing atomic layer deposition while horizontally moving a cassette to an inline type. CONSTITUTION: A cassette horizontal moving member(50) is installed in a loading chamber, a process chamber, and an unloading chamber. An atomic layer deposition member(60) is installed in an inner upper space of the process chamber. The atomic layer deposition member adheres closely to an upper side of a cassette. A cassette elevating member(70) is installed at a lower part of the atomic layer deposition member in the process chamber. The cassette elevating member transfers the cassette to the upper side and attaches the cassette closely to the atomic layer deposition member.</p> |
