| 发明名称 |
Methods of growing nitride-based film using varying pulses |
| 摘要 |
Nitride-based film is grown using multiple precursor fluxes. Each precursor flux is pulsed one or more times to add a desired element to the nitride-based film at a desired time. The quantity, duration, timing, and/or shape of the pulses is customized for each element to assist in generating a high quality nitride-based film.
|
| 申请公布号 |
US8227322(B2) |
申请公布日期 |
2012.07.24 |
| 申请号 |
US20070671784 |
申请日期 |
2007.02.06 |
| 申请人 |
FAREED QHALID;GASKA REMIGIJUS;SHUR MICHAEL;SENSOR ELECTRONIC TECHNOLOGY, INC. |
发明人 |
FAREED QHALID;GASKA REMIGIJUS;SHUR MICHAEL |
| 分类号 |
H01L21/00;C23C16/30;C23C16/44;C23C16/455;C30B25/02;C30B25/14;H01L21/205 |
主分类号 |
H01L21/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
