| 摘要 |
A non-contact conveyance system of the invention has a static pressure table for levitating a conveyance object upward, a pair of conveying units having vibrating plates and actuators and a moving unit for moving the conveying units in a conveying direction. Then, retaining forces are applied to front and rear edge portions of the conveyance object facing to the vibrating plates by exciting deflection standing waves in the vibrating plates by the actuators. Then, when the conveying units are moved while applying the retaining forces to the edge portions of the conveyance object, the conveyance object is conveyed following the move of the conveying units. Thereby, a number of parts may be cut and the system may be downsized. |
