| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate transfer apparatus which can increase linear motor efficiency by decreasing a distance between a stator surface and a permanent magnet surface. <P>SOLUTION: A vacuum partition wall 45 is disposed between a permanent magnet 42 and a driving magnet 41 to isolate space in which the permanent magnet 42 is disposed in a vacuum atmosphere, and space in which the driving magnet 41 is disposed in an air pressure atmosphere. A part of the vacuum partition wall 45 facing the permanent magnet 42 has a cross-sectional shape curved convexly toward the air pressure atmosphere side and each of the permanent magnet 42 and the driving magnet 41 has a curved part facing the vacuum partition wall 45 so as to keep a predetermined distance from the vacuum partition wall 45. As a result, the maximum deflection amount of the vacuum partition wall 45 can be decreased and a distance between the permanent magnet 42 and the driving magnet 41 can be decreased. <P>COPYRIGHT: (C)2012,JPO&INPIT |
