| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thin film capacitor which ensures to prevent a capacitor dielectric film from being reduced by hydrogen and moisture, and to provide a manufacturing method of the thin film capacitor, and to provide an electronic apparatus and a circuit board which use the thin film capacitor. <P>SOLUTION: A thin film capacitor has: a capacitor part 20 formed on a support substrate 10 and having a first capacitor electrode 14, a capacitor dielectric film 16 formed on the first capacitor electrode, and a second capacitor electrode 18 formed on the capacitor dielectric film; extraction electrodes 26a, 26b which are respectively led out from the first capacitor electrode and the second capacitor electrode and is formed by a conductive barrier film preventing hydrogen or moisture from diffusing; and electrodes for external connection 34a, 34b respectively connecting with the extraction electrodes. <P>COPYRIGHT: (C)2012,JPO&INPIT |
