发明名称 SILICON PURIFICATION METHOD AND SILICON PURIFICATION DEVICE
摘要 The silicon purification method uses a silicon purification device including at least a crucible for loading a silicon metal and a plasma torch, and purifies the silicon metal by injecting a plasma gas from the plasma torch toward a melt surface of the silicon metal loaded in the crucible in a state where an angle formed by the melt surface and the plasma gas is set in the range of 20� to 80�.
申请公布号 US2012181164(A1) 申请公布日期 2012.07.19
申请号 US201013395895 申请日期 2010.09.17
申请人 OOKUBO YASUO;NAGATA HIROSHI;ULVAC, INC. 发明人 OOKUBO YASUO;NAGATA HIROSHI
分类号 C01B33/037;B01J19/08 主分类号 C01B33/037
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