| 发明名称 |
White-light interference microscope to determine surface topography of measurement object, is provided with illumination beam path between light source and measurement object |
| 摘要 |
<p>The white-light interference microscope is provided with an illumination beam path between a light source (80) and the measurement object (1) and an imaging beam path between the measurement object and an image sensor (90). A lateral scan element is arranged in the illumination beam path.</p> |
| 申请公布号 |
DE102011000213(A1) |
申请公布日期 |
2012.07.19 |
| 申请号 |
DE20111000213 |
申请日期 |
2011.01.19 |
| 申请人 |
UNIVERSITAET KASSEL |
发明人 |
NIEHUES, JAN;LEHMANN, PETER |
| 分类号 |
G01B9/02;G01B9/04 |
主分类号 |
G01B9/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
