| 摘要 |
PURPOSE: A silicon photo electron multiplier tube having the micro lens is provided to improve the photo sensitivity by focusing the light in the effective light receiving area where the light is actually collected by modifying the path of light. CONSTITUTION: A first type silicon substrate(11) is prepared. A first type epitaxial layer(12) is formed on the substrate. A high concentration first type conductive layer(13) is formed on the epitaxial layer. A high concentration second type conductive layer(14) is formed on the high concentration first type conductive layer. The micro lens is arranged on the top of the high concentration second type conductive layer to collect the light. |
