Spherical microlens manufacturing method for optical application, involves producing relative velocity between cloth surface and surface of array, and choosing contact pressure such that microlens contacts with part of polishing cloth

摘要

The method involves manufacturing an array of spherical microlens (21), where the microlens array is polished with a planar polishing cloth carrier (24) and a resilient polishing cloth comprising a rough surface secured on the array. The polishing cloth is pressed against a polishing cloth surface (22) and a relative velocity is produced between the polishing cloth surface and a surface of the microlens array. The contact pressure is chosen such that the microlens contacts with a part of the surface polishing cloth. An independent claim is also included for a software product having a set of instructions for manufacturing a spherical microlens.