| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a thickness shear vibrator having a high Q value and less spuriousness, and further to obtain mass production means thereof. <P>SOLUTION: A protrusion, mesa portion, being opposite to upper and lower surfaces of a substrate and having a predetermined size is integrally formed at the center of a piezoelectric substrate having a circular flat plate shape or a rectangular flat plate shape while the piezoelectric substrate being configured such that a top surface of the protrusion and a surface of a peripheral portion, bevel portion, of the substrate have the same spherical shapes. A manufacturing method thereof comprises the steps of: forming a mesa type piezoelectric substrate on the piezoelectric substrate having a flat plate shape by using a photolithographic technique and an etching method; putting the piezoelectric substrate with an abrasive material into a cylindrical vessel; and rotating the cylindrical vessel at a predetermined rotational speed so as to manufacture a mesa-bevel type piezoelectric substrate. <P>COPYRIGHT: (C)2012,JPO&INPIT |
