| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dresser capable of shortening the start-up time of a polishing pad. <P>SOLUTION: A protruding part is formed on the surface of a dresser 1 by causing the surface of a holding material 2 which holds diamond abrasive grains of the dresser 1 to swell like a dome. During a dressing treatment on a new polishing pad, a part of diamond abrasive grains 5 constituting a tip of the protruding part contacts to the surface of the pressing pad at a high contact pressure, to easily cut into the surface of the polishing pad. Consequently the time required for the dressing treatment, in other words, the start-up time of the polishing pad can be shortened. <P>COPYRIGHT: (C)2012,JPO&INPIT |
