| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a spattering target for forming a transparent conductive film which is used for a liquid display device, an electroluminescent display device, a static electrification-preventing conductive film coating, a gas sensor and the like. <P>SOLUTION: This spattering target for forming the transparent conductive film has an organization in which a Zn-Ga complex oxide surrounds a Zn-Ga alloy crystal particle having a composition which contains: 0.1 to 30% by mass of Ga; and the balance comprising Zn. <P>COPYRIGHT: (C)2012,JPO&INPIT |
