CHUCKING APPARATUS AND CHUCKING METHOD USING THE SAME

摘要

PURPOSE: A chucking device and a chucking method using the same are provided to prevent the generation of stains in the organic compound evaporating process by separating a glass substrate from a chucking unit by using a separation jig. CONSTITUTION: A chucking unit(200) comprises a chuck holder(220) and a cylinder(210) formed into a flat board type. The cylinder rotates the chuck holder in various directions and angles. A separation jig(300) separates a glass substrate adhered to an adhesive face of the chuck holder from the chuck holder. The separation jig comprises a frame(310) and a separator(320). The separation jig is formed between two support bars(311, 312). A controller for controlling tensile force of a wire is formed at one of the two support bars.