ACTIVE MATRIX SUBSTRATE, METHOD FOR MANUFACTURING SAME, AND DISPLAY PANEL

摘要

An active matrix substrate (20a) comprises a gate electrode (25) provided on an insulating substrate (10a), and a planarization film (26) provided on the gate electrode (25) and formed from a baked SOG material. The gate electrode (25) is configured from a layered film comprising a first electroconductive film (27) provided on the insulating substrate (10a) and formed from a metal other than copper, a second electroconductive film (28) provided on the first electroconductive film (27) and formed from copper, and a third electroconductive film (29) provided on the second electroconductive film (28) and formed from a metal other than copper.