METHOD OF MANUFACTURING REFLECTIVE MASK, AND APPARATUS OF MANUFACTURING REFLECTIVE MASK

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a reflective mask and an apparatus of manufacturing a reflective mask which allow for improvement in productivity.

SOLUTION: The method of manufacturing a reflective mask includes a step for forming a reflective layer on the main surface of a substrate, a step for forming an absorbing layer on the reflective layer, a step for forming a pattern region on the absorbing layer, and a step for forming a light-shielding region surrounding the pattern region on the absorbing layer and the reflective layer. In the step for forming a light-shielding region, the reflective layer is etched using a gas containing chlorine and oxygen.

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