| 摘要 |
PURPOSE: A heating chamber and a heating apparatus having the same are provided to prevent an electrical short circuit between heating elements by arranging an insulating member between the heating elements spirally arranged. CONSTITUTION: A heating chamber(20) includes a sample support unit and a heating unit. A vacuum processing unit(40) forms inside the heating chamber into vacuum. A gas supply unit(50) supplies gas to inside the heating chamber. The gas supply unit includes a control valve for controlling the injection amount of the gas and a pump for supplying the gas. A monitoring unit(60) displays a vacuum condition, temperature, and pressure within the heating chamber.
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