发明名称 METHODS FOR CONTINUOUSLY CRYSTALLIZING A SILICON AND SYSTEM THEREOF
摘要 PURPOSE: A method and system for continuously crystallizing silicon are provided to prevent the stop of a process due to the stop of a vacuum furnace by operating a plurality of directional growth furnace around the vacuum furnace. CONSTITUTION: A crucible is inputted to a first congelation furnace(S11). The crucible is preheated(S12). A vacuum furnace and the first congelation furnace are matched with a nitrogen atmosphere(S13). The melt silicon is outputted from the crucible of a first growth furnace(S14). The crucible is transferred by using a conveyor belt(S15). The silicon is grown in a second congelation furnace(S16). The silicon is grown in a third congelation furnace(S17).
申请公布号 KR20120072878(A) 申请公布日期 2012.07.04
申请号 KR20100134799 申请日期 2010.12.24
申请人 MERIDIAN SOLAR & DISPLAY CO., LTD. 发明人 PIAO GUANGZHU
分类号 C30B11/00;C30B29/06;H01L21/02 主分类号 C30B11/00
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