| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an atomic flux measuring device with high precision and of low manufacturing cost which directly detects with a current the amount of active species including excited atoms, base atoms, and excited molecules of electric neutrality contained in HB (high brightness) discharge plasma flux emitted from a high frequency plasma generating cell, and calculates the amount of the active species flux based on the detected current value. <P>SOLUTION: The charged particles included in the active species flux contained in the HB discharge plasma emitted from a high frequency plasma generating cell is removed by a charged particle beam remover arranged in front of an atomic probe electrode which is biased in negative potential established beforehand by a DC power source, and the active species flux is introduced in the atomic probe electrode, and according to ionization of the active species in the atomic probe electrode, the amount of atomic flux included in the active species flux contained in the HB discharge plasma is calculated by a calculating means based on the current value detected by a first current detector. <P>COPYRIGHT: (C)2009,JPO&INPIT |
