APPRATUS FOR MEASURING TEMPERATURE DISTRIBUTION

摘要

PURPOSE: A temperature distribution measuring device is provided to measure a 3D temperature distribution without a mechanical transferring device, thereby improving the accuracy of a 3D temperature distribution measurement. CONSTITUTION: A temperature distribution measuring device comprises a light source(110), a chromatic dispersion lens(220), an objective lens(235), and a detection unit(300). The light source provides lights having a plurality of wavelengths. The chromatic dispersion lens separates beam emitted from the light source per each wavelengths. The objective lens collects the lights separated by the chromatic dispersion lens. The detection unit detects the lights reflected after irradiating the lights on a specimen.