| 摘要 |
PURPOSE: A substrate transport apparatus of a coating region and a coating apparatus including the same are provided to apply a coating solution on a substrate with a fixed thickness by preventing influences due to levitation force and suction force through a transfer plate. CONSTITUTION: A transfer plate(220) transfers a substrate on a floating unit of a coating region. A pair of first and second sliders(284a,284b) is arranged on both front and rear side surfaces of the transfer plate. The first and second sliders transfer the transfer plate. A pair of first connection members(202a) connects the transfer plate and the pair of first sliders. A pair of second connection members(202b) connects the transfer plate and the pair of second sliders. |
