发明名称 |
Liquid Processing Apparatus, Liquid Processing Method, and Recording Medium Having Program for Executing Liquid Processing Method Recorded Therein |
摘要 |
Disclosed is a liquid processing apparatus that processes a substrate with a processing liquid. The processing apparatus includes: a substrate holder configured to hold the substrate; a processing liquid supply unit configured to supply the processing liquid to the substrate held by the substrate holder; a rinsing liquid supply unit configured to supply a rinsing liquid to the substrate; and a light emitting element configured to emit light of a wavelength range, which is absorbed only by the substrate, and irradiate the emitted light to the substrate.
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申请公布号 |
US2012160274(A1) |
申请公布日期 |
2012.06.28 |
申请号 |
US201113334406 |
申请日期 |
2011.12.22 |
申请人 |
KASAI SHIGERU;SUZUKI AYUTA;SAWADA IKUO;SHINDO NAOKI;YONEDA MASATAKE;OOYA KAZUHIRO;TOKYO ELECTRON LIMITED |
发明人 |
KASAI SHIGERU;SUZUKI AYUTA;SAWADA IKUO;SHINDO NAOKI;YONEDA MASATAKE;OOYA KAZUHIRO |
分类号 |
B08B3/00 |
主分类号 |
B08B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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