| 摘要 |
PURPOSE: A method and an apparatus of sticking a pellicle for lithography are provided to prevent the generation of deformation on an exposure disk in case of sticking the pellicle to the exposure disk. CONSTITUTION: A plasticizing member is formed at a side facing the pellicle frame of a pressurizing plate(12). The plasticizing member is mounted to face the pellicle frame along the pellicle frame. When pressures are applied to the plasticizing member, the plasticizing member is easily transformed. The pellicle frame of a pellicle is pressurized toward an exposure disk based on the pressurizing plate. The plasticizing member is formed by a bag filled with low viscous liquid. The plasticizing member is formed by resin with the low modulus of elasticity.
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