| 摘要 |
PURPOSE: A power supply apparatus for generating atmospheric plasma to optimize load matching and a controlling method thereof are provided to optimize load matching between plasma capacitive loads by dynamically controlling a pulse length of an output voltage. CONSTITUTION: A rectifier(1) changes an AC voltage from a commercial AC power source into a DC voltage. An inverter unit(2) modulates the DC voltage transformed through the rectifier into the AC voltage of a pulse shape. A pulse boosting part(4) can be formed as a kind of a transformer. A capacitive load(5) is composed of two electrodes receiving an output voltage. A current detection inductor(3) detects a current which receives from the pulse boosting part. A controlling part(6) generates a gate drive signal for controlling a pulse length of an output voltage. A gate driving part(7) applies an amplified signal of the gate drive signal to an inverter part. |
