| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate failure inspection method capable of improving efficiency of inspection and manufacturing steps by efficiently using substrate failure information. SOLUTION: A substrate failure inspection method comprises: a step of providing panel substrates partitioned into a plurality of unit substrates; a step of assigning specific numbers to the panel substrates; a step of performing a first step for the plurality of the unit substrates and inspecting whether each unit substrate is faulty; a step of matching the inspection result of the first step with the specific numbers and generating inspection data; a step of performing a second step for the plurality of the unit substrates and inspecting whether the unit substrates which received a good judgment in the first step are selectively faulty based on inspection data; and a step of adding the inspection result of the second step to the inspection data. COPYRIGHT: (C)2012,JPO&INPIT |
