| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid chemical recycling method capable of simply adjusting components in a liquid chemical required in a process of treating a silicon wafer surface in an used liquid chemical used in the process and obtaining a process performance equal to that of an unused liquid chemical even with the liquid chemical after recycle processing, and a device used in the method. <P>SOLUTION: The liquid chemical recycling method of this invention is a method for recycling a liquid chemical used in the process of treating a surface of a silicon wafer 402, and includes: a step of obtaining a filtered liquid chemical by ultrafiltering an used liquid chemical after being used in the process by an ultrafiltration filter 1; a step of measuring the absorbance or transmissivity of the filtered liquid chemical by an absorbance photometer 3 and obtaining the concentration of the components included in the filtered liquid chemical; a step of obtaining an adjusted liquid chemical by adjusting the component concentration of the filtered liquid chemical on the basis of the information of the obtained concentration; and a step of using the adjusted liquid chemical in the process. <P>COPYRIGHT: (C)2012,JPO&INPIT |
