| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve such a problem that it is too difficult to block gaps even with sealing materials of low-hardness elastic body and eventually prevent vacuum leakage in a case where there are plunge steps with an acute angle at concavo-convex switching parts on uneven surfaces. <P>SOLUTION: In a vacuum suction pad, a peripheral vacuum seal wall that forms a vacuum chamber is formed with an inner seal wall and an outer seal wall that externally abuts on the inner seal wall, thus achieving a dual structure formed with double seal walls. An additional structure is provided for continuously supplying liquid between the inner seal wall and outer seal wall, so that a function that forms liquid seal walls is provided. <P>COPYRIGHT: (C)2012,JPO&INPIT |
