| 摘要 |
PURPOSE: A capacitance type mems microphones using zeolite membrane and method for manufacturing the same are provided to easily adjust sensitivity by having a porous structure. CONSTITUTION: In a capacitance type mems microphones using zeolite membrane and method for manufacturing the same, a penetration hole(H) is formed in a substrate(100). A zeolite vibration plate(110) is formed on the substrate. The zeolite vibration plate covers the penetration hole. A bottom electrode(120) is formed in the silver zeolite vibration plate. An upper electrode(130) has a plurality of air injection holes(131).
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