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摘要
申请公布号
JP4951978(B2)
申请公布日期
2012.06.13
申请号
JP20060006133
申请日期
2006.01.13
申请人
发明人
分类号
H01L29/78;H01L21/318;H01L21/336
主分类号
H01L29/78
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